Production Process of Aluminum Nitride Powder via Carbothermal Reduction Method
Aluminum nitride (AlN) is a high-performance material with high thermal conductivity (320 W·m⁻¹·K⁻¹), excellent electrical insulation (>10¹⁴ Ω·cm), and strong …
Ceramic Heaters
Ceramic Heater for Semiconductor Equipment Components
In the front-end-of-line (FEOL) processes of semiconductor manufacturing, wafers undergo various processing steps, particularly being heated to a specific …